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US 2018/0003661 A1Published application
Micro multi-array sensor
AssigneePoint Engineering Co., Ltd.
InventorsBum Mo Ahn, Seung Ho Park, Sung Hyun Byun
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Abstract
A micro multi-array sensor includes a substrate, a sensor electrode formed on the substrate, and a heater electrode formed on the substrate. The sensor electrode includes a first sensor electrode formed on the substrate and a second sensor electrode formed on an opposite surface of the substrate from the first sensor electrode. The heater electrode is disposed more adjacent to the first sensor electrode than the second sensor electrode.
Claims8
A micro multi-array sensor, comprising:
- a substrate;
- a sensor electrode formed on the substrate;
- and
- a heater electrode formed on the substrate,
- wherein the sensor electrode includes a first sensor electrode formed on the substrate and a second sensor electrode formed on an opposite surface of the substrate from the first sensor electrode, and
- the heater electrode is disposed more adjacent to the first sensor electrode than the second sensor electrode.
3 more elements
Dependencies are inferred from the claim text.