Thin film inductor and manufacturing method thereof
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsWoon Chul CHOI, Ji Hye OH, Sung Hee KIM, Jung Hyuk JUNG
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Abstract
A thin film inductor includes a body including a coil part disposed therein, wherein the coil part includes a patterned insulating film disposed on a substrate and a coil pattern formed between the patterned insulating films, the coil pattern having a lower height than the insulating film, such that the coil pattern may be formed in a structure with a high aspect ratio while having a uniform thickness, thereby increasing a cross-sectional area of the coil part and improving direct current resistance (Rdc) characteristics.
Claims15
A thin film inductor comprising:
- a body including a coil part disposed therein,
- wherein the coil part includes:
- a patterned insulating film disposed on a substrate;
- and
- a coil pattern formed between the patterned insulating films,
- the coil pattern having a lower height, in the thickness direction, than the insulating film.
A manufacturing method of a thin film inductor, the manufacturing method comprising:
- patterning a first plating layer on a substrate;
- patterning an insulating film on the substrate so that the first plating layer is exposed;
- forming a second plating layer between the patterned insulating films by performing the plating based on the first plating layer to thereby obtain a coil pattern;
- and
- forming a body by stacking magnetic sheets above and below the substrate on which the insulating film and the first and second plating layers are formed,
- wherein the coil pattern has a lower height, in the thickness direction, than the insulating film.
Dependencies are inferred from the claim text.