Processing method, processing apparatus and processing program
AssigneeRigaku Corporation
InventorsHisashi KONAKA, Akihiro HIMEDA, Toru MITSUNAGA, Keigo NAGAO
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AssigneeRigaku Corporation
InventorsHisashi KONAKA, Akihiro HIMEDA, Toru MITSUNAGA, Keigo NAGAO
Estimating the term…
Provided are a processing method, a processing apparatus and a processing program which can perform pole figure measurement continuously without overlapping of an angle α in a pole figure with the small number of times of φ scan, thereby enabling the efficient measurement. The processing method for determining conditions of pole figure measurement by X-ray diffraction, includes the steps of: receiving input of a diffraction angle 2θ; and determining an angle ω formed by an incident X-ray and an x-axis, and a tilt angle χ of a sample in each φ scan for a rotation angle φ within a sample plane so as to make a range of an angle α continuous from α=90° to α=0° without overlapping, the angle α being formed by the sample plane and a scattering vector, the range of the angle α are detectable at a time on a two-dimensional detection plane in the pole figure measurement at the input angle 2θ, in which determining the angle ω and the angle χ is repeated.
A processing method for determining conditions of pole figure measurement by X-ray diffraction, comprising the steps of:
A processing apparatus that determines conditions of pole figure measurement by X-ray diffraction, comprising:
A non-transitory computer readable recording medium having recorded thereon a processing program for determining conditions of pole figure measurement by X-ray diffraction, the processing program causing a computer to execute the processes of:
Dependencies are inferred from the claim text.