Method of manufacturing semiconductor device, and semiconductor device
AssigneeMitsubishi Electric Corporation
InventorsHiroaki TSUCHIYA, Harunaka YAMAGUCHI, Eiji NAKAI
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AssigneeMitsubishi Electric Corporation
InventorsHiroaki TSUCHIYA, Harunaka YAMAGUCHI, Eiji NAKAI
Estimating the term…
A method of manufacturing a semiconductor device includes a step of forming a mesa portion including an active layer above a substrate, and an n-type layer above the active layer, a step of forming a current confinement portion on left and right of the mesa portion, the current confinement portion including a p-type current blocking layer, an n-type current blocking layer above the p-type current blocking layer, and an i-type or p-type current blocking layer above the n-type current blocking layer, and a p-type doping step of diffusing p-type impurities into the i-type or p-type current blocking layer, an upper portion of the n-type current blocking layer, and left and right portions of the n-type layer to change the upper portion of the n-type current blocking layer and the left and right portions of the n-type layer to p-type semiconductors.
A method of manufacturing a semiconductor device, comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.