Semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorsHeedon JEONG, Jae Yup CHUNG, Heesoo KANG, Donghyun KIM, Sanghyuk HONG, Soohun HONG
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AssigneeSamsung Electronics Co., Ltd.
InventorsHeedon JEONG, Jae Yup CHUNG, Heesoo KANG, Donghyun KIM, Sanghyuk HONG, Soohun HONG
Estimating the term…
A semiconductor device includes a fin region with long and short sides, a first field insulating layer including a top surface lower than that of the fin region and adjacent to a side surface of the short side of the fin region, a second field insulating layer including a top surface lower than that of the fin region and adjacent to a side surface of the long side of the fin region, an etch barrier pattern on the first field insulating layer, a first gate on the fin region and the second field insulating layer to face a top surface of the fin region and side surfaces of the long sides of the fin region. A second gate is on the etch barrier pattern overlapping the first field insulating layer. A source/drain region is between the first gate and the second gate, in contact with the etch barrier pattern.
-22. (canceled)
A semiconductor device, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.