Encapsulated Instrumented Substrate Apparatus for Acquiring Measurement Parameters in High Temperature Process Applications
AssigneeKLA-Tencor Corporation
InventorsMei Sun, Earl Jensen, Jing G. Zhou, Ran Liu
Life of this patent
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AssigneeKLA-Tencor Corporation
InventorsMei Sun, Earl Jensen, Jing G. Zhou, Ran Liu
Estimating the term…
An apparatus includes an instrumented substrate apparatus, a substrate assembly including a bottom and top substrate mechanically coupled, an electronic assembly, a nested enclosure assembly including an outer and inner enclosure wherein the outer enclosure encloses the inner enclosure and the inner enclosure encloses the electronic assembly. An insulating medium between the inner and outer enclosure and a sensor assembly communicatively coupled to the electronic assembly including one or more sensors disposed at one or more locations within the substrate assembly wherein the electronic assembly is configured to receive one or more measurement parameters from the one or more sensors.
An apparatus comprising:
An apparatus comprising:
A method comprising:
Dependencies are inferred from the claim text.