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US 2017/0363751 A1Published application
Apparatus and method of manufacturing radiation detection panel
AssigneesKabushiki Kaisha Toshiba, Toshiba Electron Tubes & Devices Co., Ltd.
InventorsHitoshi Chiyoma, Atsuya Yoshida, Wataru Matsuyama, Toyoo Yamamoto, Hiroshi Aida, Yuichi Shimba
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Abstract
According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.
Claims7
1-19. (canceled)
A method of manufacturing a radiation detection panel, comprising:
- positioning a photoelectric conversion substrate vertically above an evaporation source such that a deposition surface of the photoelectric conversion substrate is exposed to the evaporation source and inclined with respect to a vertical axis;
- and
- evaporating a scintillator material and emitting the scintillator material vertically upward by the evaporation source to deposit a fluorescent film on the deposition surface,
- wherein
- when the scintillator material is deposited on the deposition surface, the photoelectric conversion substrate is rotated,
- the photoelectric conversion substrate is positioned to satisfy 45°≦θ≦70° at a center of the deposition surface, where θ is an angle made inside between an incident direction of the scintillator material and a normal line of the deposition surface;
- and
- the photoelectric conversion substrate is rotated by setting a rotation axis as an axis along a normal line of the center of the deposition surface.
5 more elements
Dependencies are inferred from the claim text.