Dynamic pressure sensor with improved operation

A MEMS and/or NEMS pressure sensor comprising, in a substrate extending in a sensor plane:

• a fixed part and a movable part being movable with respect to the fixed part, the movable part comprising at least one sensitive element configured to be moved or deformed in the sensor plane under effect of a pressure variation;
• at least one detector detecting movement or deformation of the sensitive element in the sensor plane due to a pressure variation;
• a first actuator actuating the movable part, the first actuator controlled to slave in position the movement or the deformation of the sensitive element;
• a first control circuitry controlling the first actuator and configured to polarize the first actuator from signals emitted by the detector, to slave in position the movement or the deformation of the sensitive element;
• wherein the first actuator comprises at least two pairs of actuating electrodes, each pair comprising a fixed actuating electrode carried by the fixed part and a movable actuating electrode facing it, carried by the movable part, and
• wherein the sensitive element comprises a sensitive face subject to pressure variations and comprises at least one housing delimited between two parallel walls of the sensitive element, a wall of which carries the sensitive face, all or part of the fixed actuating electrodes being disposed in the housing and all or part of the movable actuating electrodes being located on inner faces of the walls of the housing.