Bonded substrate and method for manufacturing bonded substrate
AssigneeNGK Insulators, Ltd.
InventorsMakoto TANI, Yasutaka AWAKURA, Takeshi KAKU, Takashi EBIGASE
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AssigneeNGK Insulators, Ltd.
InventorsMakoto TANI, Yasutaka AWAKURA, Takeshi KAKU, Takashi EBIGASE
Estimating the term…
Provided is a bonded substrate mainly for mounting a power semiconductor in which the reliability to a thermal cycle has been enhanced as compared with a conventional one. In a bonded substrate in which a copper plate is bonded to one or both main surface(s) of a nitride ceramic substrate, a bonding layer consisting of TiN intervenes between the nitride ceramic substrate and the copper plate and is adjacent at least to the copper plate, and an Ag distribution region in which Ag atoms are distributed is set to be present in the copper plate. Preferably, an Ag-rich phase is set to be present discretely at an interface between the bonding layer and the copper plate.
A bonded substrate including a copper plate bonded to one or both main surface(s) of a nitride ceramic substrate, wherein
A method for manufacturing a bonded substrate including a copper plate bonded to one or both main surface(s) of a nitride ceramic substrate, the method comprising:
Dependencies are inferred from the claim text.