Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate

A processing assembly comprising:

• a processing chamber for processing both sides of a plurality of substrates in a processing region of the processing chamber;
• and
• a substrate transportation device for transporting and/or positioning the plurality of substrates in the processing region;
• the substrate transportation device comprising a substrate holding device and a transportation system for transporting the substrate holding device, wherein the substrate holding device comprises:
• a carrier plate comprising a cavity, wherein the cavity extends from an upper side of the carrier plate through the carrier plate to a lower side of the carrier plate;
• a holding frame, which has a frame opening and a supporting surface for holding a substrate in the cavity, said supporting surface surrounding the frame opening;
• wherein the holding frame, when inserted into the cavity, partially rests on the carrier plate;
• and
• two holding regions at which the carrier plate can be supported for transporting the carrier plate, wherein the cavity is disposed between the two holding regions;
• wherein the transportation system has two holding elements in such a manner that the carrier plate of the substrate holding device is held only in the two holding regions.

A method for processing a substrate, the method comprising:

• inserting a holding frame for holding the substrate into a cavity in a carrier plate, wherein the holding frame has a supporting surface for supporting the substrate;
• placing the substrate onto the supporting surface of the holding frame;
• and
• processing the substrate through a frame opening while it is held in the cavity by means of the holding frame;
• and
• transporting the carrier plate, wherein the carrier plate is held only in two holding regions, between which the cavity is disposed.

A substrate holding device comprising:

• a carrier plate;
• two supporting regions that extend parallel to each other at which the substrate holding device can be supported in order for the latter to be transported;
• and
• a plurality of substrate placement regions that are disposed between the two supporting regions, each of said substrate placement regions comprising a cavity, which from an upper side of the carrier plate extends through the carrier plate to a lower side of the carrier plate, and each of said substrate placement regions comprising a holding frame which has a frame opening and a supporting surface for holding a substrate in the cavity, said supporting surface surrounding the frame opening;
• wherein the holding frame, when inserted into the cavity, partially rests on the carrier plate.