Photoconductive antenna for terahertz waves, method for producing such photoconductive antenna and terahertz time domain spectroscopy system

Abstract

The present invention relates to a metal-metal interdigitated photoconductive antenna that generates and/or detects terahertz waves, the photoconductive antenna comprising at least one substrate (1) and at least one electrode (2) on the front face of the substrate (1), wherein said photoconductive antenna comprises at least one layer (4) formed of a material reflective to terahertz waves, said layer (4) extending below the front face of the substrate (1) at a distance lower than the wavelength; and it comprises an interdigitated geometry on said front face of the substrate (1) comprising a first metallization layer of 5 nm Cr and 150 nm Au for the interdigitated electrodes (2), equally spaced by a distance Δ, is made on said front face of the substrate (1); a 500 nm-thick layer of SiO2 (5) deposited over the first metallization layer; and a second metallic layer composed of metallic fingers (6) covering gaps with a periodicity double that of the distance Δ.

Dependencies are inferred from the claim text.