US 2017/0318385 A1 · MICROELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE BIAS VOLTAGE

Abstract

Microelectromechanical systems (MEMS) sensors and related bias voltage techniques are described. Exemplary MEMS sensors, such as exemplary MEMS acoustic sensors or microphones described herein can employ one or more bias voltage generators and single-ended or differential amplifier arrangements. Various embodiments are described that can effectively increase the bias voltage available to the sensor element without resorting to high breakdown voltage semiconductor processes. In addition, control of the one or more bias voltage generators in various operating modes is described, based on consideration of a number of factors.

Claims26

Dependent claims

A microelectromechanical systems (MEMS) microphone, comprising:

a MEMS microphone element comprising a diaphragm and a backplate disposed in a microphone package;
an application specific integrated circuit (ASIC) disposed in the microphone package comprising a first bias voltage generator and a second bias voltage generator, wherein the first bias voltage generator is operatively coupled to the diaphragm and configured to provide a first bias voltage to the diaphragm and the second bias voltage generator is operatively coupled to the backplate and configured to provide a second bias voltage to the backplate, and wherein the second bias voltage is of opposite polarity of the first bias voltage.

Dependencies are inferred from the claim text.

Facts

Application

15/142,696Filed 29 Apr 2016

Published

2 Nov 2017

Term ends

Not estimatedThe source records don’t support an estimate.

Classification16 codes

H04R 3/00
Circuits for transducers
B81B 3/0013
Arrangements for avoiding sticking of the flexible or moving parts: structures dimensioned for mechanical prevention of stiction, e.g. spring with…
B81B 7/008
Microstructural systems ; Auxiliary parts of microstructural devices or systems: mEMS characterised by an electronic circuit specially adapted for…
H02M 3/07
Using resistors or capacitors, e.g. potential divider: using capacitors charged and discharged alternately by semiconductor devices with control…

Microelectromechanical systems (mems) microphone bias voltage

Life of this patent

Microelectromechanical systems (mems) microphone bias voltage

Life of this patent

Abstract

Claims26