Methods for fabricating electronic devices including substantially hermetically sealed cavities and getter films

A method for fabricating an electronic device, the method comprises:

• forming a getter film overlying a first portion of an electronic device body structure;
• forming conductive features extending through the first portion of the electronic device body structure for operatively coupling the conductive features with the getter film for electrical communication with the getter film;
• sealing the first portion of the electronic device body structure with a second portion of the electronic device body structure to form a substantially hermetically sealed cavity in the electronic device body structure such that the getter film is in fluid communication with the substantially hermetically sealed cavity and the conductive features are accessible from outside the substantially hermetically sealed cavity;
• heating the electronic device body structure including the getter film after sealing the first portion with the second portion to activate the getter film to form an activated getter film for effectively absorbing and/or adsorbing gas to produce and/or maintain a vacuum condition in the substantially hermetically sealed cavity;
• and
• using the conductive features, determining a resistance of the activated getter film.