Sensor device
AssigneeAlps Electric Co., Ltd.
InventorsEiji UMETSU, Hisanobu OKAWA
Life of this patent
Estimating the term…
Abstract
A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a spring portion provided between the frame portion and the sensor portion; and a circuit board including a circuit configured to process the signal output from the detection element, in which the frame portion is laminated on the circuit board, and the sensor portion is cantilevered from the frame portion by the spring portion such that a gap is formed between the sensor portion and the circuit board.
Claims7
A sensor device comprising:
- a sensor portion including:
- a movable thin film;
- and
- a detection element configured to output a detection signal corresponding to an amount of displacement of the movable thin film;
- a frame portion surrounding the sensor portion;
- a spring portion provided between the frame portion and the sensor portion, the spring portion being a single cantilever extending from the frame portion so as to support the sensor portion;
- and
- a circuit board including a circuit configured to process the detection signal from the detection element,
- wherein the frame portion and the sensor portion are is provided on the circuit board such that a first gap is formed between the sensor portion and the circuit board.
Dependencies are inferred from the claim text.