Laminated hard coating and molding die
AssigneeKabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
InventorKenji YAMAMOTO
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Abstract
A laminated hard film is obtained by laminating a layer A and a layer B. The layer A has a composition different from that of the layer B. The layer A is formed of (TiaCrbAlcSid)(CxN1-x) and satisifies the relationship of 0≦a≦0.10, 0.10≦b≦0.50, 0.50≦c≦0.90, 0≦d≦0.05, a+b+c+d=1 and 0≦x≦0.5. The layer B is formed of (CreSi1-e)(CyN1-y) and satisfies the relationship of 0.90≦e≦1.0 and 0≦y≦0.5, or is formed of (AlfSi1-f)(C2N1-z) and satisfies the relationship of 0.90≦f≦1.0 and 0≦x≦0.5. Each of the layer A and the layer B has a thickness of 2 to 100 nm, and the layer A and the layer B are each alternately laminated.
Claims16
A laminated hard film obtained by laminating a layer A and a layer B, the layer A having a composition different from that of the layer B, wherein
- the layer A is formed of (TiaCrbAlcSid)(CxN1-x) and satisfies the relationship of 0≦a≦0.10, 0.10≦b≦0.50, 0.50≦c≦0.90, 0≦d≦0.05, a+b+c+d=1 and 0≦x≦0.5, when atomic ratios of Ti, Cr, Al, Si and C are defined as a, b, c, d and x, respectively,
- the layer B is formed of (CreSi1-e) (CyN1-y) and satisfies the relationship of 0.90≦e≦1.0 and 0≦y≦0.5, when atomic ratios of Cr and C are defined as e and y, respectively, or is formed of (AlfSi1-f)(CzN1-z) and satisfies the relationship of 0.90≦f≦1.0 and 0≦y≦0.5, when atomic ratios of Al and C are defined as f and z, respectively, and
- each of the layer A and the layer B has a thickness of 2 to 100 nm, and the layer A and the layer B are each alternately laminated.
Dependencies are inferred from the claim text.