Tool for annealing of magnetic stacks
AssigneeIII Holdings 1, LLC
InventorKrishnakumar Mani
Life of this patent
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Abstract
In one embodiment of the invention, there is provided a tool for annealing a magnetic stack. The tool includes a housing defining a heating chamber; a holding mechanism to hold at least one wafer in a single line within the heating chamber, a heating mechanism to heat the at least one wafer; and a magnetic field generator to generate a magnetic field whole field lines pass through the single line of wafers during a magnetic annealing process; wherein the holding mechanism comprises a wafer support of holding the single line of wafers between the heating mechanism and the magnetic field generator.
Claims20
A tool for annealing a magnetic stack, the tool comprising:
- a housing defining a heating chamber;
- a holding mechanism configured to hold at least one wafer in a single line within the heating chamber;
- a heating mechanism configured to heat the at least one wafer;
- and
- a magnetic field generator configured to generate a magnetic field whose magnetic field lines pass though the single line of wafers during a magnetic annealing process.
A method for annealing a magnetic stack, the method comprising:
- modifying a thermal processor for semiconductor wafer processing by retrofitting a magnetic field generator thereto;
- and
- performing thermal and magnetic annealing processes on the magnetic stack with the modified thermal processor.
A tool for annealing a magnetic stack, the tool comprising:
- a housing defining a heating chamber;
- a holding mechanism configured to hold a plurality of wafers in a single line within the heating chamber;
- a heating mechanism including a grid of resistive conductors configured to heat the plurality of wafers;
- and
- a magnetic field generator including a plurality of elongated conductors configured to generate, during a magnetic annealing process, a magnetic field whose magnetic field lines pass though the plurality of wafers;
- wherein the heating mechanism and the magnetic field generator are configured to sandwich the plurality of wafers between them.
Dependencies are inferred from the claim text.