Baw devices having top electrode leads with reduced reflectance

A method comprising:

• providing a bottom electrode;
• forming a piezoelectric layer, wherein the bottom electrode is coupled to a bottom surface of the piezoelectric layer;
• forming a top electrode on a top surface of the piezoelectric layer, wherein:
• the top surface of the piezoelectric layer is opposite the bottom surface of the piezoelectric layer;
• and
• an active region for a resonator is formed where the bottom electrode and the top electrode overlap;
• forming a top electrode lead that is on the top surface of the piezoelectric layer and extending from the top electrode;
• applying an anti-reflective layer (ARL) over a first portion of a top surface of the top electrode lead, wherein the ARL has a reflectance less than 40% R;
• and
• forming an enclosure that comprises a cap and an outer wall, wherein:
• the outer wall extends from the cap toward the top surface of the piezoelectric layer to form a cavity;
• a first portion of the outer wall resides over the ARL that is over the first portion of the top surface of the top electrode lead;
• and
• the top electrode resides in the cavity.