US 2017/0288522 A1 · PIEZOELECTRIC VIBRATION COMPONENT AND METHOD FOR MANUFACTURING THE SAME

Abstract

A lid and an insulating bonding layer that seal a piezoelectric vibrator on a substrate are bonded with higher strength. A piezoelectric vibration component includes a substrate having a principal surface on which a piezoelectric vibrator is mounted, an insulating film disposed on the principal surface, a lid having a recess opening toward the principal surface and an edge portion around the recess. Moreover, first and second insulating bonding layers are interposed between the lid and the substrate. The first and second insulating bonding layers are joined together between the edge portion and the insulating film so as to seal the piezoelectric vibrator in a space between the recess and the principal surface.

Claims18

Dependent claims

A vibration component comprising:

a substrate having a principal surface;
a piezoelectric vibrator disposed on the principal surface of the substrate;
an insulating film disposed on the principal surface of the substrate;
a lid having an edge portion;
and
a first insulating bonding layer and a second insulating bonding layer interposed between the lid and the substrate,
wherein the first and second insulating bonding layers are joined together and disposed between the edge portion of the lid and the insulating film so as to seal the piezoelectric vibrator between the lid and the principal surface of the substrate.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

15/631,451Filed 23 Jun 2017

Priority

JP 2015-0024848 Jan 2015

Published

5 Oct 2017

Term ends

Not estimatedThe source records don’t support an estimate.

Classification8 codes

H03H 3/02
For the manufacture of electromechanical resonators or networks: for the manufacture of piezoelectric or electrostrictive resonators or networks
H03H 9/0519
Consisting of mounting pads or bumps: for cantilever
H03H 9/1021
The enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device: the BAW device…
H10W 76/60
Containers; Fillings or auxiliary members therefor; Seals: seals

Piezoelectric vibration component and method for manufacturing the same

Life of this patent

Piezoelectric vibration component and method for manufacturing the same

Life of this patent

Abstract

Claims18