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US 2017/0288479 A1Published application
Magnetic circuits for mems devices
AssigneeIntel Corporation
InventorsKonstantin Matyuch, Barak Freedman, Vladimir Malamud, Arnon Hirshberg, Israel Petronius
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Abstract
An example apparatus for produce magnetic fields includes a base plate comprising a plurality of grooves. The apparatus includes an MEMS device disposed on the base plate. The apparatus further includes a number of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device.
Claims20
An apparatus for producing magnetic fields, comprising:
- a base plate comprising a plurality of grooves;
- a micro-electromechanical system (MEMS) device disposed on the base plate;
- and
- a plurality of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device.
1 more element
A method for manufacturing a magnetic circuit for a micro-electromechanical system (MEMS) device, comprising:
- fabricating a base plate with a plurality of grooves to surround the MEMS device;
- disposing an adhesive onto a plurality of grooves to retain one or more magnets of the magnetic circuit;
- and
- disposing the one or more magnets onto the plurality of grooves.
1 more element
A system for producing magnetic fields, comprising:
- a processor;
- a base plate comprising a plurality of grooves;
- a micro-electromechanical system (MEMS) device electrically coupled to the processor and disposed on the base plate;
- and
- a plurality of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device.
2 more elements
Dependencies are inferred from the claim text.