Laminated film and process for manufacturing the same, as well as method for analyzing laminated film

An analysis method for analyzing the cured state of an inorganic polymer layer in a laminated film comprising at least a gas barrier layer and an inorganic polymer layer being laminated on a resin substrate, comprising:

• a step of calculating a Y value from a transmission electron microscope image of a cross section of the inorganic polymer layer by the following procedures (a) to (d).
• (a) A standard deviation (σ) of the contrast of an electron beam-unirradiated part of the inorganic polymer layer is calculated. A standard deviation σ is obtained by performing division into twenty of the inorganic polymer layer of a transmission electron microscope image obtained by photographing so that a gradation average value of a carbon deposition layer in a cross-sectional sample of the laminated film of a width of 90 nm, which was prepared by microsampling using a focused ion beam machining observation device, becomes 80 to 90 with a standard deviation of 3 to 5, so that divided ones have an equal film thickness in a film thickness direction, obtaining a standard deviation from a histogram when each cross section of 3rd to 18th divisions is gray scale-displayed at 256 gradations, and calculating a standard deviation (σ) as an average value thereof.
• (b) An electron beam-irradiated part of the inorganic polymer layer is divided into twenty so that the divided ones have an equal film thickness in a film thickness direction, and a standard deviation of the contrast of each divided part (σm:
• standard deviation of nth division, n=1˜20) is calculated. A standard deviation σn is obtained by irradiating a cross-sectional sample of the laminated film having a width of 90 nm, which was prepared by microsampling using a focused ion beam machining observation device, with an electron beam at 1.30×1016 ions/cm2, and calculating a standard deviation from a histogram when a transmission electron microscope image obtained by photographing a cross section of each divided part of the inorganic polymer layer after electron irradiation under the same condition as that of a gradation average value of a carbon deposition layer set at (a) is gray scale-displayed at 256 gradations.
• (c) Xn (n=1˜20) of each divided part is calculated from the expression (1).
• Xn=σn/σ(n=1˜20) (1)
• (d) A standard deviation of X3 to X18 is defined as Y.

A process for manufacturing a laminated film comprising at least a gas barrier layer and an inorganic polymer layer being laminated on a resin substrate, comprising:

• a step of forming the gas barrier layer by chemical vapor deposition,
• wherein a Y value calculated from a transmission electron microscope image of a cross section of the inorganic polymer layer by the following procedures (a) to (d) is 0.220 or less.
• (a) A standard deviation (σ) of the contrast of an electron beam-unirradiated part of the inorganic polymer layer is calculated. A standard deviation σ is obtained by performing division into twenty of the inorganic polymer layer of a transmission electron microscope image obtained by photographing so that a gradation average value of a carbon deposition layer in a cross-sectional sample of the laminated film of a width of 90 nm, which was prepared by microsampling using a focused ion beam machining observation device, becomes 80 to 90 with a standard deviation of 3 to 5, so that divided ones have an equal film thickness in a film thickness direction, obtaining a standard deviation from a histogram when each cross section of 3rd to 18th divisions is gray scale-displayed at 256 gradations, and calculating a standard deviation (σ) as an average value thereof.
• (b) An electron beam-irradiated part of the inorganic polymer layer is divided into twenty so that the divided ones have an equal film thickness in a film thickness direction, and a standard deviation of the contrast of each divided part (σn:
• standard deviation of nth division, n=1˜20) is calculated. A standard deviation σn is obtained by irradiating a cross-sectional sample of the laminated film having a width of 90 nm, which was prepared by microsampling using a focused ion beam machining observation device, with an electron beam at 1.30×1016 ions/cm2, and calculating a standard deviation from a histogram when a transmission electron microscope image obtained by photographing a cross section of each divided part of the inorganic polymer layer after electron irradiation under the same condition as that of a gradation average value of a carbon deposition layer set at (a) is gray scale-displayed at 256 gradations.
• (c) Xn (n=1˜20) of each divided part is calculated from the expression (1).
• Xn=σn/σ(n=1˜20) (1)
• (d) A standard deviation of X3 to X18 is defined as Y.