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US 2017/0288145 A1Published application
Method of forming a graphene structure
AssigneeInfineon Technologies AG
InventorsHans-Joachim Schulze, Peter Irsigler, Guenther Ruhl
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Abstract
In various embodiments, a method of forming a graphene structure is provided. The method may include forming a body including at least one protrusion, and forming a graphene layer at an outer peripheral surface of the at least one protrusion.
Claims18
A method of forming a graphene structure, comprising:
- forming at least one opening in a body;
- and
- forming a graphene layer at an inner peripheral surface of the at least one opening.
A method of forming a graphene structure, comprising:
- forming at least one cylindrical opening in a body, wherein a diameter of the opening is chosen to fulfill a relation d=78.3□((n+m)2−n×m)0.5 pm, wherein n and m are integer values, at least one of n and m being greater than 0;
- and
- forming a graphene layer at an inner peripheral surface of the at least one opening.
Dependencies are inferred from the claim text.