Piezoelectric element
AssigneeNGK Insulators, Ltd.
InventorsMasayuki UETANI, Tomohiko HIBINO, Akifumi MORISHITA
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Abstract
A piezoelectric element includes a piezoelectric body having a main phase configured by lead zirconate titanate and a heterogenous phase configured by a different component to lead zirconate titanate, and a pair of electrodes provided on the piezoelectric body. The piezoelectric body has a surface region within 10 μm of a surface, and an inner region more than 10 μm from the surface. A surface area coverage of the heterogenous phase in a cross section of the surface region is at least 0.75% greater than a surface area coverage of the heterogenous phase in a cross section of the inner region.
Claims6
A piezoelectric element comprising;
- a piezoelectric body having a main phase configured by lead zirconate titanate and a heterogenous phase configured by a different component to lead zirconate titanate, and
- a pair of electrodes provided on the piezoelectric body,
- the piezoelectric body having a surface region within 10 μm of a surface, and an inner region more than 10 μm from the surface,
- a surface area coverage of the heterogenous phase in a cross section of the surface region being at least 0.75% greater than a surface area coverage of the heterogenous phase in a cross section of the inner region.
Dependencies are inferred from the claim text.