Semiconductor device and method of producing semiconductor device
AssigneeSharp Kabushiki Kaisha
InventorsTakao SAITOH, Seiji KANEKO, Yohsuke KANZAKI, Yutaka TAKAMARU, Keisuke IDE, Takuya MATSUO
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AssigneeSharp Kabushiki Kaisha
InventorsTakao SAITOH, Seiji KANEKO, Yohsuke KANZAKI, Yutaka TAKAMARU, Keisuke IDE, Takuya MATSUO
Estimating the term…
A semiconductor device includes an oxide semiconductor film, a first insulating film, and a second insulating film. The oxide semiconductor film is made of oxide semiconductor material. The oxide semiconductor film includes a low resistance portion having an electrical resistance lower than another portion. The low resistance portion is separated from the other portion. The first insulating film is formed in an upper layer relative to the oxide semiconductor film. The first insulating film includes a hole at a position overlapping the low resistance portion. The second insulating film is formed in an upper layer relative to the first insulating film. The second insulating film and contains hydrogen.
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