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US 2017/0288012 A1Published application
Analog capacitor
AssigneeSK hynix Inc.
InventorsJun Ho CHEON, Chang Yong AHN, Seok Joon KANG
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Abstract
An analog capacitor is disclosed. The analog capacitor may include a main analog capacitor, an interlayer insulating layer, and a plurality of stacked sub analog capacitors. The main analog capacitor may be formed over a semiconductor substrate. The interlayer insulating layer may be interposed between the semiconductor substrate and the main analog capacitor. The plurality of stacked sub analog capacitors may be inserted into the interlayer insulating layer.
Claims20
An analog capacitor comprising:
- a semiconductor substrate;
- a first level capacitor formed on the semiconductor substrate;
- a second level capacitor formed over the first level capacitor;
- and
- a third level capacitor formed over the second level capacitor,
- wherein each of the first to third level capacitors includes a first capacitor electrode and a second capacitor electrode insulated from each other to constitute a capacitor, and
- the first capacitor electrodes of the first and second level capacitors are floating, and the first capacitor electrode of the third level capacitor is selectively coupled to an output voltage terminal.
4 more elements
An analog capacitor comprising:
- a semiconductor substrate in which a first interlayer insulating layer is formed;
- a first level capacitor formed over the first interlayer insulating layer and including a first capacitor electrode and a second capacitor electrode;
- a second interlayer insulating layer formed over the first interlayer insulating layer in which the first level capacitor is formed;
- a second level capacitor formed over the second interlayer insulating layer and including a first capacitor electrode and a second capacitor electrode;
- a third interlayer insulating layer formed over the second interlayer insulating layer in which the second level capacitor is formed;
- a third level capacitor formed over the third interlayer insulating layer and including a first capacitor electrode and a second capacitor electrode;
- and
- a contact unit configured to electrically couple the second capacitor electrodes of the first, second and third level capacitors to each other.
5 more elements
An analog capacitor comprising:
- a semiconductor substrate;
- a main analog capacitor formed over the semiconductor substrate;
- an interlayer insulating layer interposed between the semiconductor substrate and the main analog capacitor;
- and
- a plurality of stacked sub analog capacitors inserted into the interlayer insulating layer.
2 more elements
Dependencies are inferred from the claim text.