Electronic device, method of manufacturing the same, and camera
AssigneeCanon Kabushiki Kaisha
InventorsHidemasa Oshige, Nobutaka Ukigaya
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AssigneeCanon Kabushiki Kaisha
InventorsHidemasa Oshige, Nobutaka Ukigaya
Estimating the term…
A method of manufacturing an electronic device, comprising fixing a first wafer on a second wafer to form a space theirbetween, via a surrounding member configured to surround the space, forming an opening on a bottom side of the first wafer to expose a conductive member included in the first wafer, and then forming an electrode connected to the conductive member, wherein, in the fixing, the first wafer includes a trench intersecting the surrounding member, on an upper side of the first surface, and, in the forming, the electrode is formed under a condition that the space communicates with an external space via the trench.
A method of manufacturing an electronic device, comprising:
An electronic device comprising:
Dependencies are inferred from the claim text.