Micro-Transfer Printed LED and Color Filter Structure

A color-filter source wafer, comprising:

• a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors;
• a patterned color-filter layer including a color filter disposed entirely on or over each sacrificial portion;
• and
• one or more color-filter tethers physically connecting each color filter, or layers formed in contact with the color filter, to an anchor.

A method of making a color-filter source wafer, comprising:

• providing a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors;
• disposing a color filter layer on or over the wafer;
• and
• patterning a color filter entirely on or over each sacrificial portion.

A pixel structure source wafer, comprising:

• a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors;
• an LED disposed entirely on or over each sacrificial portion, the LED having a light-emitting side;
• a color filter disposed adjacent to the light-emitting side of the LED, the color filter disposed entirely on or over each sacrificial portion;
• and
• one or more pixel tethers physically connecting each LED or color filter to an anchor.

An intermediate structure source wafer, comprising:

• a source wafer having a patterned sacrificial layer including sacrificial portions separated by anchors;
• a patterned intermediate substrate layer disposed on or over the patterned sacrificial layer forming separate and independent intermediate substrates, each intermediate substrate disposed entirely over a sacrificial portion;
• one or more pixel structures disposed entirely on each intermediate substrate, each pixel structure including an LED, the LED having a light-emitting side, and a color filter disposed adjacent to the light-emitting side of the LED;
• one or more fractured pixel tethers physically attached to each pixel structure;
• and
• an intermediate tether physically attached to the intermediate substrate or a layer on the intermediate substrate.