US 2017/0287764 A1 · ELECTROSTATIC CHUCK DEVICE

Abstract

The present invention provides an electrostatic chuck device capable of increasing the electrostatic adsorptive force for a focus ring and uniformly cooling the focus ring. In an electrostatic chuck device (10) of the present invention, a mounting table (11) has a holder (15) being provided in the periphery of a placing surface (24a) along the circumferential direction of a focus ring (12) and electrostatically adsorbing the focus ring (12), the holder (15) has a pair of banks (16) being provided in the circumferential direction and being for placing the focus ring (12) thereon, and an annular groove (17) formed between these banks, and, in at least a bank (16A) on an outer circumferential position of the focus ring (12) among the pair of the banks (16), a micro-protruding part including a plurality of micro-protrusions is formed on a surface facing the focus ring (12), or convex parts (18) are provided on a bottom (17a) of the groove (17). The convex parts (18) do not come into contact with the focus ring, and the pair of the banks (16) or the plurality of the micro-protrusions comes into contact with the focus ring (12) and electrostatically adsorbs the focus ring (12) in coordination with the convex parts (18).

Claims15

Dependent claims

An electrostatic chuck device, comprising:

a mounting table provided with a placing surface on which a plate-like specimen is to be placed;
an annular focus ring being placed on the mounting table and surrounding a periphery of the placing surface;
and
a cooler for cooling the mounting table and the focus ring;
wherein:
the mounting table comprises a holder for electrostatically adsorbing the focus ring, the holder being provided in a periphery of the placing surface along a circumferential direction of the focus ring,
the holder comprises a pair of banks being provided in a circumferential direction and being for placing the focus ring thereon, and an annular groove formed between the pair of the banks,
the cooler provides a heat-transferring gas to the groove,
convex parts are provided on a bottom of the groove,
the pair of the banks is in contact with the focus ring,
the convex parts are not in contact with the focus ring, and
the pair of the banks and the convex parts electrostatically adsorb the focus ring in a coordinating fashion.

9 more elements

An electrostatic chuck device, comprising:

a mounting table provided with a placing surface on which a plate-like specimen is to be placed;
an annular focus ring being placed on the mounting table and surrounding a periphery of the placing surface;
and
a cooler for cooling the mounting table and the focus ring;
wherein:
the mounting table comprises a holder for electrostatically adsorbing the focus ring, the holder being provided in a periphery of the placing surface along a circumferential direction of the focus ring,
the holder comprises a pair of banks being provided in a circumferential direction and being for placing the focus ring thereon, and an annular groove formed between the pair of the banks,
a micro-protruding part comprising a plurality of a micro-protrusions is formed on a surface facing the focus ring in at least on a bank on an outer circumferential position of the focus ring among the pair of the banks,
the cooler provides a heat-transferring gas to the groove, and
the plurality of the micro-protrusions is in contact with the focus ring and electrostatically adsorbs the focus ring.

7 more elements

Dependencies are inferred from the claim text.

Electrostatic chuck device

Life of this patent

Electrostatic chuck device

Life of this patent

Abstract

Claims15