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US 2017/0287762 A1Published application
Plating apparatus and plating method
AssigneeEbara Corporation
InventorYoshio MINAMI
Life of this patent
Estimating the term…
Abstract
A plating apparatus allows a substrate holder to be serviced easily while ensuring easy access to the substrate holder and while a substrate is being processed in the plating apparatus. The plating apparatus includes a plating section for plating a substrate, a substrate holder for holding the substrate, a substrate holder transporter for holding and transporting the substrate holder, a stocker for storing the substrate holder, and a stocker setting section for storing the stocker therein. The stocker includes a moving mechanism for moving the stocker into and out of the stocker setting section.
Claims5
A plating apparatus comprising:
- a table for placing a substrate holder thereon, the substrate holder capable of detachably holding a substrate;
- a plating section for holding a plating solution therein for plating the substrate, held by the substrate holder, by immersing the substrate in a vertical plane in the plating solution;
- a substrate holder transporter for transporting the substrate holder between the table and the plating section, the substrate holder transporter including a holding portion for holding the substrate holder;
- and
- a substrate holder opening and closing mechanism for opening and closing the substrate holder placed on the table,
- wherein the substrate holder includes
- a movable supporting member having a rotatable support member, and
- a fixed supporting member for gripping the substrate holder in cooperation with the movable supporting member, the movable supporting member being secured to the fixed supporting member, and
- wherein the substrate holder opening and closing mechanism includes
- a head portion for pressing the movable supporting member and capable of holding the movable supporting member, the head portion having at least a rotatable portion configured to rotate the movable supporting member relative to the fixed supporting member to thereby secure the movable supporting member to the fixed supporting member and release the movable supporting member from the fixed supporting member,
- a first actuator for vertically moving the head portion, and
- a second actuator for rotating at least the portion of the head portion,
- wherein the movable supporting member is removable from the fixed supporting member by the movement of the head portion caused by the first actuator, with the movable supporting member being released from the fixed supporting member.
10 more elements
A plating apparatus comprising:
- a table for placing a substrate holder thereon, the substrate holder capable of detachably holding a substrate;
- a plating section for holding a plating solution therein for plating the substrate, held by the substrate holder, by immersing the substrate in a vertical plane in the plating solution;
- a substrate holder opening and closing mechanism for opening and closing the substrate holder placed on the table,
- wherein the substrate holder includes
- a movable supporting member, and
- a fixed supporting member for gripping the substrate holder in cooperation with the movable supporting member, the movable supporting member being secured to the fixed supporting member, and
- wherein the substrate holder opening and closing mechanism includes
- a head portion for pressing the movable supporting member and capable of holding the movable supporting member, the head portion having at least a rotatable portion configured to rotate the movable supporting member relative to the fixed supporting member to thereby secure the movable supporting member to the fixed supporting member and release the movable supporting member from the fixed supporting member,
- a first actuator for vertically moving the head portion, and
- a second actuator for rotating at least the portion of the head portion,
- wherein the movable supporting member is removable from the fixed supporting member by the movement of the head portion caused by the first actuator, with the movable supporting member being released from the fixed supporting member.
8 more elements
Dependencies are inferred from the claim text.