Substrate processing apparatus and substrate presence or absence checking method and program

A substrate presence or absence checking method to be executed by a substrate processing apparatus that includes a transport mechanism for transporting a substrate along a predetermined transport passage while holding the substrate, and a sensor for detecting whether the substrate is held by the transport mechanism, comprising:

• acquiring position information of the substrate in the transport passage;
• acquiring a detection result from the sensor;
• determining whether the detection result of the sensor is consistent with the position information;
• and
• making the sensor retry to detect whether the substrate is held when it is determined that the detection result of the sensor is inconsistent with the position information.

A program to be executed by a substrate processing apparatus that includes a transport mechanism for transporting a substrate along a predetermined transport passage while holding the substrate, and a sensor for detecting whether the substrate is held by the transport mechanism, the program making the substrate processing apparatus execute:

• processing of acquiring position information of the substrate in the transport passage;
• processing of acquiring a detection result from the sensor;
• processing of determining whether the detection result of the sensor is consistent with the position information;
• and
• processing of making the sensor retry to detect whether the substrate is held when it is determined that the detection result of the sensor is inconsistent with the position information.