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US 2017/0287745 A1Published application
Heater elements with enhanced cooling
OwnerArsalan Emamiinventor
Life of this patent
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Abstract
A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates.
Claims21
(canceled)
A heater, comprising:
- an external shell;
- a process chamber comprising one or more heater elements,
- an insulation layer providing insulation to the process chamber from an outside ambient;
- one or more channels embedded within the insulation layer,
- wherein the disposition of the channels separates the insulation layer into an inner layer and an outer layer,
- wherein a plurality of channels surrounds the process chamber;
- one or more fins coupled to the channels for heat dissipation;
- a plenum coupled to one or more channels disposed at an end portion of the heater,
- wherein the plenum comprises an inlet and one or more outlets,
- wherein the plenum directs flow into the channels, and
- wherein the outlets restrict flow within the channels for controlling a convection rate of the heater.
8 more elements
A heater, comprising:
- a process chamber comprising one or more heater elements;
- an insulation layer providing insulation to the process chamber from an outside ambient,
- wherein the insulation layer surrounds the heater elements;
- one or more channels disposed between an outer side of the insulation layer and an outer shell of the heater,
- wherein a plurality of channels surrounds the insulation layer;
- one or more fins coupled to the channels for heat dissipation;
- a plenum coupled to one or more channels disposed at an end portion of the heater,
- wherein the plenum comprises an inlet and one or more outlets,
- wherein the plenum directs flow into the channels, and
- wherein the outlets restrict flow within the channels for controlling a convection rate of the heater.
7 more elements
A heater, comprising:
- an insulation layer providing insulation to a process chamber from an outside ambient,
- wherein the insulation layer surrounds the heater elements,
- wherein the insulation layer comprises a curve-shape;
- one or more embedded channels disposed within the insulation layer,
- wherein the disposition of the embedded channels separates the insulation layer into an inner layer and an outer layer,
- wherein a plurality of embedded channels surrounds the process chamber;
- one or more outer channels disposed between an outer side of the insulation layer and an outer shell of the heater, and
- wherein a plurality of outer channels surrounds the insulation layer.
5 more elements
Dependencies are inferred from the claim text.