Aerosol deposition coating for semiconductor chamber components

An article comprising:

• a body;
• and
• a coating on the body, the coating comprising a first rare earth metal oxide nanoparticle, a second rare earth metal oxide nanoparticle, and a third metal oxide nanoparticle, wherein the coating has a particle crystal structure and wherein:
• the article as a component of a processing chamber;
• the first rare earth metal oxide is Y2O3 and the coating comprises the Y2O3 in a range of 40 mol % to less than 100 mol %;
• the second rare earth metal oxide is ZrO2 and the coating comprises the ZrO2 in a range of greater than 0 mol % to less than 60 mol %;
• and
• the third metal oxide is Al2O3 and the coating comprises the Al2O3 at a range of greater than 0 mol % to 40 mol %.

A component of a processing chamber, the component comprising a coating that was deposited on the component by a process comprising:

• loading the component into a deposition chamber;
• reducing a pressure of the deposition chamber below atmospheric pressure;
• and
• depositing a coating on the component by spraying an aerosol of ceramic nanoparticles comprising a mixture of a first rare earth metal oxide, a second rare earth metal oxide, and a third metal oxide onto the component at approximately room temperature, wherein the coating has a particle crystal structure and wherein:
• the first rare earth metal oxide is Y2O3 and the mixture comprises the Y2O3 in a range of 40 mol % to less than 100 mol %;
• the second rare earth metal oxide is ZrO2 and the mixture comprises the ZrO2 in a range of greater than 0 mol % to less than 60 mol %;
• and
• the third metal oxide is Al2O3 and the mixture comprises the Al2O3 at a range of greater than 0 mol % to 40 mol %.

An article comprising:

• a component of a processing chamber;
• and
• a coating on the component, the coating comprising a first rare earth metal oxide nanoparticle and a second metal oxide nanoparticle, wherein the coating has a particle crystal structure and wherein:
• the first rare earth metal oxide is Er2O3;
• and
• the second metal oxide is Al2O3.