Systems and methods for performing edge ring characterization

A method of determining characteristics a substrate processing system, the method comprising:

• arranging a test substrate on an inner portion of a substrate support, wherein the test substrate includes a contact finger extending outward from an edge of the test substrate;
• at least one of (i) raising an edge ring surrounding the inner portion to cause an inner diameter of the edge ring to engage the contact finger and (ii) lowering the inner portion to cause the inner diameter of the edge ring to engage the contact finger;
• determining when the inner diameter of the edge ring engages the contact finger;
• and
• determining at least one characteristic of the substrate processing system based on the determination of when the inner diameter of the edge ring engages the contact finger.