Control-electrode shielding for improved linearity of a mems dvc device

A method of manufacturing a MEMS digital variable capacitor (DVC), wherein the improvement comprises:

• depositing an electrically conductive layer over a first dielectric layer;
• patterning the electrically conductive layer to form a first electrode, an RF electrode, a ground electrode and a shielding electrode, wherein the shielding electrode is disposed adjacent the RF electrode and the first electrode, wherein the shielding electrode is grounded;
• depositing a second dielectric layer over the substrate, the first electrode, the RF electrode, the ground electrode and the shielding electrode;
• planarizing the second dielectric layer to expose the first electrode, the RF electrode, the ground electrode and the shielding electrode;
• depositing a third dielectric layer over the exposed electrodes and the second dielectric layer;
• forming a moving electrode above the third dielectric layer;
• forming a fourth dielectric layer over the moving electrode;
• and
• forming a second electrode over the fourth dielectric layer, wherein the second electrode is disposed opposite the first electrode, wherein the moving electrode is movable from a first position in contact with the third dielectric layer and a second position in contact with the fourth dielectric layer.