Fluid control apparatus
AssigneeHORIBA STEC, Co., Ltd.
InventorKatsuya Ohtani
Life of this patent
Estimating the term…
Loading patent…
AssigneeHORIBA STEC, Co., Ltd.
InventorKatsuya Ohtani
Estimating the term…
A fluid control apparatus is provided which makes it possible to effortlessly perform cable connection even when a plurality of the fluid control apparatuses are disposed adjacent to each other. The fluid control apparatus includes fluid control units to control a flow rate or pressure of a fluid, an electric circuit board to send and receive a signal to and from the fluid control units, a casing to accommodate therein the fluid control units and the electric circuit board, and an apparatus-side connector interposed between the electric circuit board and a cable electrically connected thereto. The fluid control apparatus further includes a connector board configured to mount thereon the apparatus-side connector. The connector board is secured to the electric circuit board with at least a part of the connector board in surface contact with the electric circuit board, or overlapping the electric circuit board with a clearance therebetween.
A fluid control apparatus, comprising:
A fluid control apparatus, comprising:
Dependencies are inferred from the claim text.