Substrate processing apparatus, device management controller, and recording medium

A non-transitory computer-readable recording medium storing a program that causes a device management controller to perform a process, wherein the device management controller includes at least a parts management control part configured to monitor states of parts constituting an apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus, the process comprising:

• monitoring a maintenance timing of the parts constituting the apparatus and outputting maintenance timing monitoring result data;
• comparing the device data generated by the apparatus with standard data and outputting device state monitoring result data;
• comparing the facility data of the apparatus with reference data corresponding to the facility data and outputting utility monitoring result data;
• and
• deriving information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of the maintenance timing monitoring result data, the device state monitoring result data and the utility monitoring result data.