Smart tool monitoring system
AssigneeApplied Materials, Inc.
InventorsSubramaniam Iyer, Devendrappa Holeyannavar
Life of this patent
Estimating the term…
Loading patent…
AssigneeApplied Materials, Inc.
InventorsSubramaniam Iyer, Devendrappa Holeyannavar
Estimating the term…
A method for operating a smart tool monitoring system is described. The method includes monitoring, by a controller within a smart tool monitoring system, a first parameter associated with a first component internal to the smart tool monitoring system. The method also includes determining, by the controller, whether the first parameter satisfies a first criterion. The method also includes performing a first action in response to a determination that the first parameter satisfies the first criterion. The method also includes receiving a measurement value from a sensor of an article of manufacturing equipment that includes a second component external to the smart tool monitoring system. The method also includes determining, by the controller, whether the measurement value satisfies a second criterion. The method also includes performing a second action in response to a determination that the measurement value satisfies the second criterion.
A method comprising:
A system comprising:
An alternating current (AC) power panel comprising:
Dependencies are inferred from the claim text.