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US 2017/0285494 A1Published application
Cover member, conveying apparatus, lithography apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsKazunori Nakajima, Shigeo Koya
Life of this patent
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Abstract
A cover member that covers a first surface on an opposite side with respect to a holding surface of a holding portion that holds a substrate, the cover member including a first removing member that removes a foreign substance attached to the first surface, in which the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface.
Claims19
A cover member that covers a first surface on an opposite side with respect to a holding surface of a holding portion that holds a substrate, the cover member comprising:
- a first removing member that removes a foreign substance attached to the first surface,
- wherein the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface.
A conveying apparatus that conveys a holding portion that includes a holding surface that holds a substrate, the conveying apparatus comprising:
- a conveying portion that conveys the holding portion, and a cover member that covers a first surface on an opposite side with respect to the holding surface of the holding portion;
- and
- an attaching and detaching portion that attaches and detaches the holding portion to and from the cover member,
- wherein the cover member comprises a first removing member that removes a foreign substance attached to the first surface,
- wherein the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface,
- wherein the conveying portion conveys the holding portion and the cover member to 1a movable moving unit that holds the holding portion while having the first surface and the first removing member of the cover member be in contact with each other,
- wherein the conveying portion conveys the cover member from the moving unit, and
- wherein the attaching and detaching portion conveys the holding portion to the moving unit.
5 more elements
A conveying apparatus that conveys a holding portion that includes a holding surface that holds a substrate, the conveying apparatus comprising:
- a conveying portion that conveys the holding portion, and a cover member that covers a first surface on an. opposite side with respect to the holding surface of the holding portion;
- and
- an attaching and detaching portion that attaches and detaches the holding portion to and from the cover member,
- wherein the attaching and detaching portion dismounts the holding portion from a movable moving unit that holds the holding portion,
- wherein the conveying portion conveys the cover member to the moving unit,
- wherein the attaching and detaching portion attaches the holding portion to the cover member,
- wherein the conveying portion conveys the holding portion and the cover member from the moving unit, and
- wherein the cover member
- includes a first removing member that removes a foreign substance attached to the first surface, and
- is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface.
7 more elements
A lithography apparatus comprising:
- a movable moving unit that holds a holding portion that includes a holding surface that holds a substrate;
- and
- a conveying apparatus that conveys the holding portion, wherein the conveying apparatus includes
- a conveying portion that conveys the holding portion, and a cover member that covers a first surface on an opposite side with respect to the holding surface of the holding portion;
- and
- an attaching and detaching portion that attaches and detaches the holding portion to and from the cover member,
- wherein the cover member comprises a first removing member that removes a foreign substance attached to the first surface,
- wherein the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface,
- wherein the conveying portion conveys the holding portion and the cover member to a movable moving unit that holds the holding portion while having the first surface and the first removing member of the cover member be in contact with each other,
- wherein the conveying portion conveys the cover member from the moving unit, and
- wherein the attaching and detaching portion conveys the holding portion to the moving unit.
8 more elements
A method of manufacturing an article, the method comprising:
- forming a pattern on a substrate by using a lithography apparatus;
- and
- treating the substrate on which a pattern has been formed in the forming step, wherein the article is manufactured from the substrate that has been treated,
- wherein the lithography apparatus includes,
- a movable moving unit that holds a holding portion that includes a holding surface that holds the substrate, and
- a conveying apparatus that conveys the holding portion,
- wherein the conveying apparatus includes,
- a conveying portion that conveys the holding portion, and a cover member that covers a first surface on an opposite side with respect to the holding surface of the holding portion;
- and
- an attaching and detaching portion that attaches and detaches the holding portion to and from the cover member, wherein the cover member comprises a first removing member that removes a foreign substance attached to the first surface,
- wherein the cover member is capable of being fixed to the holding portion while the first surface and the first removing member are in contact with each other covering the first surface,
- wherein the conveying portion conveys the holding portion and the cover member to a movable moving unit that holds the holding portion while having the first surface and the first removing member of the cover member be in contact with each other,
- wherein the conveying portion conveys the cover member from the moving unit, and
- wherein the attaching and detaching port on conveys the holding portion to the moving unit.
11 more elements
Dependencies are inferred from the claim text.