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US 2017/0285471 A1Published application
Fluorine-containing composition, substrate for pattern formation, photodegradable coupling agent, pattern formation method and transistor production method
AssigneeNikon Corporation
InventorsYusuke KAWAKAMI, Kazuo YAMAGUCHI
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Abstract
Disclosed is a fluorine-containing composition containing a fluorine-containing compound represented by general formula (1) and a fluorine-based solvent.
Claims9
A fluorine-containing composition, comprising:
- a fluorine-containing compound represented by the following general formula (1), and a fluorine-based solvent:
- (wherein,
- X represents a halogen atom or alkoxy group,
- R1 represents a hydrogen atom or linear, branched or cyclic alkyl group having 1 to 10 carbon atoms,
- Rf1 and Rf2 respectively and independently represent a fluorinated alkoxy group, and
- n represents an integer of 0 or more).
3 more elements
Dependencies are inferred from the claim text.