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US 2017/0285470 A1Published application
Cholate photoacid generators and photoresists comprising same
AssigneeRohm and Haas Electronic Materials LLC
InventorsEmad Aqad, Mingqi Li, Joseph Mattia, Cheng-Bai Xu
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Abstract
New photoacid generator compounds (“PAGs”) are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds.
Claims15
A photoacid generator compound that is selected from the following Formula (I) and (II):
- wherein in each of Formulae (I) and (II):
- M+ represent an organic onium group;
- R1 is a steroid structure;
- m is an integer of 0 to 10;
- n is a positive integer.
2 more elements
A photoacid generator compound of the following formula (III):
- (R)—X—(C═O)O(CH2)m(CWY)nSO3M+ (III)
- wherein R is a steroid structure,
- X is a linker;
- W and Y are each independently in each occurrence hydrogen or fluoro;
- M+ represent an organic onium group;
- m is an integer of 0 to 10:
- n is a positive integer.
4 more elements
A photoacid generator compound of the following formula (IV):
- (R)—X—O(C═O)(CH2)m(CWY)nSO3M+ (IV)
- wherein R is a steroid structure,
- X is a linker;
- W and Y are each independently in each occurrence hydrogen or fluoro;
- M+ represent an organic onium group;
- m is an integer of 0 to 10;
- n is a positive integer.
4 more elements
A photoacid generator compound selected from:
- wherein in each structure M+ represents an organic onium group, and the definition of the group R, m and n are defined directly below each structure.
A photoacid generator compound selected from:
Dependencies are inferred from the claim text.