Resist composition and method for forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakashi NAGAMINE, Yuta IWASAWA
Life of this patent
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Abstract
A resist composition which includes a polymer compound including a structural unit which is derived from an acrylic ester in which the hydrogen atom bonded to an α-position carbon atom may be substituted with a substituent and which has a lactone-containing cyclic group containing other electron withdrawing groups such as a cyano group at a side chain terminal, and a compound whose a conjugate acid has an acid dissociation constant (pKa) of less than 3.
Claims12
A resist composition which generates an acid upon exposure and whose solubility in a developing solution changes under the action of the acid, the resist composition comprising:
- a base material component (A) whose solubility in the developing solution changes under the action of the acid and which contains a polymer compound (A1) having a structural unit (a0) represented by the following general formula (a0-1);
- and
- an acid diffusion control agent component (D) which contains a compound (D1) whose a conjugate acid has an acid dissociation constant (pKa) of less than 3:
- wherein R is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms;
- Va0 is a divalent hydrocarbon group which may have a substituent;
- na0 is an integer of 0 to 2;
- Ra1 and Ra2 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, an alkoxy group, or an alkylthio group, or Ra1 and Ra2 may be bonded to each other so as to form an alkylene group having 1 to 6 carbon atoms, which may contain an oxygen atom or a sulfur atom, an ether bond, or a thioether bond;
- Ra′01 is a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydroxyalkyl group having 1 to 6 carbon atoms, of which the hydroxy group may be protected by a protective group and which may have a halogen atom, a carboxy group which may forma salt, or a substituted oxycarbonyl group;
- p0 is an integer of 0 to 8, and in a case where two or more Ra′01's are present, the plural Ra′01's may be the same as or different from each other;
- X is a group represented by general formula (a0-r-1), a cyano group, a halogen atom, a halogenated alkyl group, —C(═O)ORa5, —OC(═O)Ra5, —CON (Ra6)(Ra7), —SO2N(Ra8)(Ra9), or —SO2Ra0, in which Ra5 to Ra9 each independently represent a hydrogen atom or an alkyl group, Ra0 is an alkyl group, and in the formula (a0-r-1), Ra3 and Ra4 each independently represent a hydrogen atom or a nonaromatic hydrocarbon group which may have a substituent, or Ra3 and Ra4 may be bonded to each other so as to form a ring with the carbon atom to which Ra3 is bonded and the nitrogen atom to which Ra4 is bonded, and a symbol of * represents a bond;
- and
- q0 is an integer of 1 to 9, and in a case where two or more X's are present, the plural X's may be the same as or different from each other.
Dependencies are inferred from the claim text.