Stage apparatus
AssigneeRicoh Imaging Company, Ltd.
InventorEiichi ITO
Life of this patent
Estimating the term…
Abstract
A stage apparatus includes a movable member configured to move in a direction parallel to a predetermined plane, a base member configured to support the movable member to move relative to the base member, and a thrust generator including: a magnet provided on one the movable member and the base member, and a coil provided on the other of the movable member and the base member. The magnet and the coil generating a thrust to move the movable member in a direction parallel to the predetermined plane. A magnetic flux density of the magnet toward the coil changes along the thrust direction.
Claims19
A stage apparatus comprising:
- a movable member configured to move in a direction parallel to a predetermined plane;
- a base member configured to support said movable member to move relative to said base member;
- and
- a thrust generator including:
- a magnet provided on one of said movable member and said base member, and
- a coil provided on the other of said movable member and said base member,
- said magnet and said coil generating a thrust to move said movable member in a direction parallel to said predetermined plane,
- wherein a magnetic flux density of said magnet toward said coil changes along the thrust direction.
A stage apparatus for an image projector apparatus, comprising:
- a movable member configured to move in a direction parallel to a predetermined plane, said movable member provided with one of an image-forming element which forms an image and a projector optical system that is configured to project an image formed by an image-forming element;
- a base member configured to support said movable member to move relative to said base member;
- and
- a thrust generator including:
- a magnet provided on one said movable member and said base member, and
- a coil provided on the other of said movable member and said base member,
- said magnet and said coil generating a thrust to move said movable member in a direction parallel to said predetermined plane,
- wherein a magnetic flux density of said magnet toward said coil changes along the thrust direction.
Dependencies are inferred from the claim text.