Electro-optic device, electronic apparatus, and method of manufacturing electro-optic device
AssigneeSeiko Epson Corporation
InventorTakashi SHINOHARA
Life of this patent
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Abstract
In an electro-optic device, a chip provided with a mirror and a drive element adapted to drive the mirror, a cover having a light-transmitting property and adapted to cover the mirror in a planar view, and a spacer located between the cover and the chip are disposed on an interconnection board. Further, a boundary between the cover and the spacer, a boundary between the chip and the spacer, and a part of the interconnection board are covered with an inorganic film such as an aluminum oxide film. The inorganic film also covers a part of a chip-side terminal and an internal terminal, and a conductive member.
Claims12
An electro-optic device comprising:
- an interconnection board;
- a chip mounted on one surface of the interconnection board, and provided with a mirror and a drive element adapted to drive the mirror;
- a cover having a light-transmitting property, and adapted to cover the mirror;
- a spacer located between the cover and the chip;
- and
- an inorganic film adapted to cover a boundary between the cover and the spacer, a boundary between the chip and the spacer, and a part of the interconnection board.
A method of manufacturing an electro-optic device, comprising:
- disposing a chip provided with a mirror and a drive element adapted to drive the mirror on one surface of an interconnection board, a cover adapted to cover the mirror, and a spacer located between the cover and the chip;
- and
- forming an inorganic film adapted to cover a boundary between the cover and the spacer, and a boundary between the spacer and the chip after disposing the chip.
Dependencies are inferred from the claim text.