Method for controlling position of a linear mems mirror with variable resolution and/or light intensity

Abstract

The method for controlling an angular position of a MEMS mirror, includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra moment. The extra moment may be a DC offset. After a transient period of time from zooming instant, a third driving moment M2=k{dot over (θ)}2t is applied. The first and third driving moment are variable linearly with time. The driving moments are applied to torsional springs of the mirror.

Dependencies are inferred from the claim text.