Hybrid MEMS scanning module
AssigneeApple Inc.
InventorsRaviv Erlich, Alexander Shpunt, Yuval Gerson
Life of this patent
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AssigneeApple Inc.
InventorsRaviv Erlich, Alexander Shpunt, Yuval Gerson
Estimating the term…
A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support.
A scanning device, comprising:
A method for producing a scanning device, the method comprising:
Dependencies are inferred from the claim text.