US 2017/0285311 A1 · ZOOM SYSTEM WITH INTERCHANGEABLE OPTICAL ELEMENTS

Abstract

A method for adjusting the magnification scale of an optical imaging device for exposing or inspecting substrates is provided. The optical imaging device includes a first optical element group, which includes a plurality of first optical elements in an imaging beam path. The method includes replacing optical elements of the first optical element group in the imaging beam path by optical elements of a second optical element group for the purposes of adjusting the magnification scale. The first optical element group includes two reflecting optical elements with first optical parameters, which define a first Petzval sum. The second optical element group includes two reflecting optical elements with second optical parameters, which define a second Petzval sum. The value of the first Petzval sum is at least substantially identical to the value of the second Petzval sum.

Claims22

Dependent claims

A method of adjusting a magnification scale of an optical imaging device, the optical imaging device comprising a first optical element group comprising a plurality of first optical elements in an imaging beam path of light having a wavelength of less than 200 nm, the method comprising:

adjusting the magnification scale of the optical imaging device by replacing the optical elements of the first optical element group with optical elements of a second optical element group in the imaging beam path,
wherein:
the first optical element group comprises two reflecting optical elements with first optical parameters defining a first Petzval sum;
the second optical element group comprises two reflecting optical elements with second optical parameters defining a second Petzval sum;
and
a value of the first Petzval sum is at least substantially identical to a value of the second Petzval sum.

3 more elements

An optical imaging unit, comprising:

a first optical element group comprising a plurality of first optical elements are arranged in an imaging beam path or radiation having a wavelength of less than 200 nm;
a support structure supporting the first optical elements,
wherein:
the support structure and the optical elements of the first optical element group are configured so that, normal operation of the imaging unit, the optical elements of the first optical element group are replaced in the imaging beam path by optical elements of a second optical element group to adjust a magnification scale of the imaging unit;
the first optical element group comprises two reflecting optical elements with first optical parameters defining a first Petzval sum;
the second optical element group comprises two reflecting optical elements with second optical parameters defining a second Petzval sum;
and
a value of the first Petzval sum is at least substantially identical to a value of the second Petzval sum.

5 more elements

Dependencies are inferred from the claim text.

Zoom system with interchangeable optical elements

Life of this patent

Zoom system with interchangeable optical elements

Life of this patent

Abstract

Claims22