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AssigneesShanghai Ic R&D Center Co., Ltd, Chengdu Light Collector Technology Co., Ltd.
InventorLinlin Liu
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The present invention discloses a test structure and a method for judging the de-embedding accuracy of RF devices, which comprises testing the S parameters of a target device test structure, an introduced device test structure and an auxiliary test structure, respectively. Then calculating de-embedding S parameters of the target device test structure and the introduced device test structure according to the above-tested results, respectively. Finally, calculating performance parameters of the target device test structure according to the above-calculated de-embedding S parameters. So, the accuracy of the de-embedding method is determined by comparing the consistency of the performance parameters. The present invention can directly judge the de-embedding accuracy and the applicable frequency range of a given de-embedding method by analyzing the testing data. Further, the using of the parallel test structure and the cascade test structure together can increase the reliability of the judgment results.
A test structure for judging the de-embedding accuracy of a RF device by using an introduced device, comprising a target device test structure D1, an introduced device test structure and a corresponding auxiliary test structure D5, wherein the introduced device test structure includes a reference device test structure D2, a parallel test structure D3 of the target device and the reference device, a cascade test structure D4 of the target device and the reference device;
A method for judging the de-embedding accuracy of a RF device by using an introduced device, characterized that the de-embedding accuracy is judged by combination calculations of a target device test structure D1, an introduced device test structure and a corresponding auxiliary test structure D5, wherein the introduced device test structure comprises a reference device test structure D2, a parallel test structure D3 of the target device and the reference device, a cascade test structure D4 of the target device and the reference device;
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