Optimization of integrated circuit reliability

A computer program product for optimizing reliability of integrated circuits, the computer program product comprising:

• one or more computer-readable storage media and program instructions stored on the one or more computer-readable storage media, the program instructions comprising:
• program instructions to integrate a per-chip equivalent oxide thickness (EOT) circuit sensor into an integrated circuit;
• program instructions to utilize the per-chip EOT circuit sensor to determine electrical characteristics of the integrated circuit;
• program instructions to determine physical attributes of the integrated circuit based on the electrical characteristics;
• program instructions to model a predicted integrated circuit failure rate based on the physical attributes;
• program instructions to define a qualification plan required to meet qualification objectives of a technology;
• and
• program instructions to access EOT sensor circuit data stored in a database and using the EOT sensor circuit data to calculate an oxide thickness value of the integrated circuit.