Solid state impedance tuners

A solid state impedance tuner system operable at RF frequencies to present impedances to a device under test (DUT) and enable measurement of the DUT's performance as a function of such impedances in a measurement system, comprising:

• a housing structure;
• the housing structure supporting first, second, third and fourth RF ports;
• first and second solid state tuner modules disposed within said housing structure, each tuner module having a first module port and a second module port;
• the first port of the first module connected to said first RF port, the second port of the first module connected to said second RF port, the first port of the second module connected to said third RF port, and the second port of the second module connected to said fourth RF port;
• each of said tuner modules comprising a control element array configured to have a plurality of solid state control elements selectively turned on to achieve a desired impedance state;
• the impedance tuner system configured to be a single tuner system by connection of the second and third RF ports by a jumper cable, wherein the first and fourth RF ports are single tuner system connection ports, or alternatively as an impedance tuner system comprising separate impedance tuners in which the first and second RF ports are connection ports to a first tuner and the third and fourth RF ports are connection ports to a second tuner.

A solid state impedance tuner system operable at RF frequencies to present impedances to a device under test (DUT) and enable measurement of the DUT's performance as a function of such impedances in a measurement system, comprising:

• a housing structure;
• first and second solid state tuner modules disposed within said housing structure;
• wherein each of said first and second tuner modules includes at least one solid state control element;
• the first and second solid state tuner modules electrically cascaded together in series;
• a controller configured to selectively turn on or off each control element by application of a control signal to the corresponding control line to vary an impedance presented by the system;
• and
• wherein the tuner system is operable to independently control said impedance at two frequencies.