Grazing incidence x-ray fluorescence spectrometer and grazing incidence x-ray fluorescence analyzing method

A grazing incidence X-ray fluorescence spectrometer comprising:

• an X-ray source configured to emit X-rays;
• a bent spectroscopic device configured to monochromate the X-rays emitted from the X-ray source and form an X-ray beam that is focused on a fixed position on a surface of a sample;
• a slit member disposed between the bent spectroscopic device and the sample, the slit member having a linear opening by which a width of the passing X-ray beam is limited in a focusing angle direction;
• a slit member moving unit configured to move the slit member in a direction that intersects the X-ray beam passing through the linear opening;
• a glancing angle setting unit configured to move the slit member by using the slit member moving unit, and set a glancing angle of the X-ray beam to a desired angle;
• and
• a detector configured to measure an intensity of fluorescent X-rays generated from the sample that is irradiated with the X-ray beam.