Optical device

Optical device comprising

• a. an imaging optical unit for imaging an object field in an image field,
• b. a structured mask, which is arranged in the region of an object plane of the imaging optical unit by means of a reticle holder that can be displaced in a reticle scanning direction, and
• c. a sensor apparatus, which is arranged in the region of an image plane of the imaging optical unit by means of a substrate holder that can be displaced in a substrate scanning direction,
• d. wherein the mask has at least one measurement structure to be imaged on the sensor apparatus,
• e. wherein the measurement structure is embodied such that a plurality of channels are formed for a channel-resolved test of the imaging optical unit.

Method for testing an imaging optical unit, comprising the following steps:

• providing an imaging optical unit with at least one optical element for imaging an object field in an image field,
• providing a mask with structures to be imaged,
• providing a sensor apparatus with a multiplicity of sensor elements,
• wherein the sensor rows are embodied as separate, spatially separated components,
• arranging the mask in an object plane of the imaging optical unit by means of a reticle holder that can be displaced in a reticle scanning direction,
• arranging the substrate in an image plane of the imaging optical unit by means of a substrate holder that can be displaced in a substrate scanning direction,
• arranging the sensor apparatus in the region of the image plane by means of the substrate holder,
• imaging at least a first part of the structures to be imaged on the substrate by means of the imaging optical unit,
• imaging a second part of the structures of the mask to be imaged on the sensor apparatus by means of the imaging optical unit.